Method for continual preparation of polycrystalline silicon using a fluidized bed reactor

ABSTRACT

There is provided a method for continual preparation of granular polycrystalline silicon using a fluidized bed reactor, enabling a stable, long-term operation of the reactor by effective removal of silicon deposit accumulated on the inner wall of the reactor tube. The method comprises (i) a silicon particle preparation step, wherein silicon deposition occurs on the surface of the silicon particles, while silicon deposit is accumulated on the inner wall of the reactor tube encompassing the reaction zone; (ii) a silicon particle partial discharging step, wherein a part of the silicon particles remaining inside the reactor tube is discharged out of the fluidized bed reactor so that the height of the bed of the silicon particles does not exceed the height of the reaction gas outlet; and (iii) a silicon deposit removal step, wherein the silicon deposit is removed by supplying an etching gas into the reaction zone.

TECHNICAL FIELD

The present invention relates to a method for preparation ofpolycrystalline silicon using a fluidized bed reactor, particularly to amethod for continual preparation of polycrystalline silicon enablingeffective removal of silicon deposit accumulated on the inner wall ofthe reactor tube of a polycrystalline silicon (multicrystalline silicon,polysilicon or poly-Si) manufacturing apparatus.

BACKGROUND ART

High purity polycrystalline silicon is widely used as a chemical or anindustrial source material in semiconductor devices, solar cells, etc.Also, it is used in manufacturing precision functional devices andsmall-sized, highly-integrated precision systems. The polycrystallinesilicon is prepared by thermal decomposition and/or hydrogen reductionof highly-purified silicon-containing reaction gas, thus causing acontinuous silicon deposition on silicon particles.

In commercial-scale production of polycrystalline silicon, a bell-jartype reactor has been mainly used. Polycrystalline silicon productsproduced using the bell-jar type reactor is rod-shaped and has adiameter of about 50-300 mm. However, the bell-jar type reactor, whichconsists fundamentally of the electric resistance heating system, cannotbe operated continuously due to inevitable limit in extending themaximum rod diameter achievable. This reactor is also known to haveserious problems of low deposition efficiency and high electrical energyconsumption because of limited silicon surfaces and high heat loss.

To solve these problems, there was developed recently a silicondeposition process using a fluidized bed reactor to producepolycrystalline silicon in the form of particles having a size of about0.5-3 mm. According to this method, a fluidized bed of silicon particlesis formed by the upward flow of gas and the size of the siliconparticles increases as the silicon atoms deposit on the particles fromthe silicon-containing reaction gas supplied to the heated fluidizedbed.

As in the conventional bell-jar type reactor, a Si—H—Cl-based silanecompound, e.g., monosilane (SiH₄), dichlorosilane (SiH₂Cl₂),trichlorosilane (SiHCl₃), silicon tetrachloride (SiCl₄) or a mixturethereof is used in the fluidized bed reactor as the silicon-containingreaction gas, which can further comprise at least one gas componentselected from hydrogen, nitrogen, argon, helium, etc.

For the silicon deposition to prepare polycrystalline silicon, thereaction temperature, or the temperature of silicon particles, should bemaintained at about 600-850° C. for monosilane, while being about900-1,100° C. for trichlorosilane which is most widely used.

The process of silicon deposition, which is caused by thermaldecomposition and/or hydrogen reduction of silicon-containing reactiongas, includes various elementary reactions, and there are complex routeswhere silicon atoms grow into granular particles depending on thereaction gas. However, regardless of the kind of the elementaryreactions and the reaction gas, the operation of the fluidized bedreactor yields polycrystalline silicon product in the form of particles,that is, granules.

Here, smaller silicon particles, i.e., seed crystals become bigger insize due to continuous silicon deposition or the agglomeration ofsilicon particles, thereby losing fluidity and ultimately being moveddownwards. The seed crystals may be prepared or generated in situ in thefluidized bed itself, or supplied into the reactor continuously,periodically or intermittently. Thus prepared bigger particles, i.e.,polycrystalline silicon product may be discharged from the lower part ofthe reactor continuously, periodically or intermittently.

Due to the relatively high surface area of the silicon particles, thefluidized bed reactor system provides a higher reaction yield than thatby the bell-jar type reactor system. Further, the granular product maybe directly used without further processing for the follow-up processessuch as single crystal growth, crystal block production, surfacetreatment and modification, preparation of chemical material forreaction or separation, or shaped body or pulverization of siliconparticles. Although these follow-up processes have been operated in abatchwise manner, the manufacture of the granular polycrystallinesilicon allows the processes to be performed in a semi-continuous orcontinuous manner.

The biggest stumbling block in continuous production of particle-shaped,i.e., granular polycrystalline silicon using a fluidized bed reactor isthat silicon deposition by the reaction gas occurs not only on thesurfaces of the silicon particles heated to a high temperature but alsoon the surfaces of the reactor components that are inevitably exposed toor in contact with the hot silicon particles.

Silicon deposition occurs and is accumulated on the hot solid surfacesinside the fluidized bed reactor, including the silicon particles, theinner wall of the reactor tube and the reaction gas supplying means, allof which are exposed to the reaction gas. The thickness of theaccumulated deposition layer increases with time. Here, it beneficiallyconforms to the purpose of the fluidized-bed deposition process that thethickness of the silicon deposition layer gradually increases on thesurfaces of the silicon seed crystals or silicon particles. It ishowever disastrous when silicon deposition exceeds an allowable level atthe solid surfaces of the reactor components, except for the siliconparticles, including the inner wall of the reactor tube and/or thereaction gas supplying means exposed to or in contact with thehigh-temperature fluidizing silicon particles. If silicon deposition onsuch reactor components exceeds the allowed extent of mass or thickness,they should be greatly deteriorated in mechanical stability and, in thelong run, the operation of the reactor has to be stopped.

For economical production of particle-shaped, i.e., granularpolycrystalline silicon, improvement of the productivity of thefluidized bed reactor is essential. Further, for continuous operation ofthe fluidized bed reactor, which is the primary advantage of thefluidized-bed silicon deposition process, physical stability of thereactor components should be secured most of all. Thus, in order toimprove the productivity of the fluidized bed reactor and secure themechanical stability of the reactor during the silicon depositionprocess for preparing polycrystalline silicon particles, it is requiredto effectively remove the silicon deposit which is formed at the reactorcomponents due to their constant exposure to and contact with the hotsilicon particles and the reaction gas. Such an effective removal of thesilicon deposit is more important in bulk production of polycrystallinesilicon particles using a fluidized bed reactor. But, there are only afew techniques related to this.

U.S. Pat. No. 5,358,603 (1994) discloses a method for removing by anetching method the silicon deposit formed specifically on the productdischarging means of the fluidized bed reactor during the fluidized-bedsilicon deposition process. This method using an etching gas may also beapplied to the removal of the silicon deposit formed at the inner wallof the reactor tube. However, application of this method basicallyrequires following steps: first the deposition operation should bestopped; all the silicon particles within the fluidized bed should bedischarged out of the reactor; then a heating means should be insertedinto the reactor to heat up the silicon deposit for an etching reaction,etc. Such cumbersome and time-consuming steps limit the application ofthis method to the fluidized-bed deposition process.

U.S. Pat. No. 6,541,377 (2003) discloses a method of preventing silicondeposition on the outlet surface of the reaction gas supplying means orremoving the silicon deposit formed thereon during deposition operation,wherein such objects are achieved by supplying an etching gas includinghydrogen chloride without interfering with the supply of the reactiongas. This method can solve the problem of silicon deposition at theoutlet of the reaction gas supplying means without affecting theoperation of the silicon deposition process. However, since the etchinggas is selectively supplied near the outlet of the reaction gassupplying means, the method cannot be applied for removing the silicondeposit formed and accumulated on the inner wall of the reactor tube.

U.S. Pat. Nos. 4,900,411 (1990) and 4,786,477 (1988) disclose a methodof preventing silicon deposit from accumulating at the gas supplyingmeans and at the inner wall of the reactor tube by circulating a coolingfluid around the corresponding components. However, since an excessivecooling of such reactor components in continuous contact with hotsilicon particles consumes unnecessarily a huge amount of energy, thismethod is economically unfavorable considering an additional facilityinvestment and a high production cost due to heavy energy consumptionfor heating silicon particles compensating the energy loss.

Different from other materials used in general chemical processes, thecomponents of the fluidized bed reactor for preparing high puritypolycrystalline silicon, especially, the reactor tube in contact withthe silicon particles should be employed such that an impuritycontamination of them should be avoided to the highest degree possible.Therefore, selection of the material for the reactor tube is muchrestricted. Due to the high reaction temperature and the characteristicof the reaction gas, metallic materials cannot be used for the reactortube. Meanwhile, it is very difficult, in practice, to find anon-metallic, inorganic material that can prevent the impuritycontamination of the silicon particles and ensure sufficient mechanicalstability even when the silicon deposit becomes heavily accumulated atits inner wall.

The reactor tube of the fluidized bed reactor for preparation ofpolycrystalline silicon, which is in incessant contact with hot,fluidizing silicon particles, is vulnerable to irregular vibration andsevere stress. Thus, it is very dangerous to continue silicon depositionif the thickness of the silicon deposit on the inner wall of the reactortube exceeds an allowed value.

When removing by a chemical reaction or an etching reaction the silicondeposit formed and accumulated on the inner wall of the reactor tubeduring the silicon deposition for preparation of silicon particles, alarge portion of the silicon particles fluidizing inside the reactortube can also be removed together. That is, selective removal of thesilicon deposit is almost impossible. Thus, it is the common practice tostop the silicon deposition, cool the inside of the reactor whilepurging with such an inert gas as hydrogen, nitrogen, argon, helium or amixture thereof, discharge or withdraw the cooled silicon particles outof the reactor, disassemble the reactor and replace the reactor tubewith a new one, reassemble the reactor, fill silicon particles into thereactor tube, heat the silicon particles sufficiently and supply thereaction gas again to resume the preparation of silicon particles.However, much is needed for the disassembling and reassembling of thefluidized bed reactor. In addition, the reactor tube tends to break whenthe reactor is cooled because of the difference in the degree of thermalexpansion of the silicon deposit and the reactor tube material.Consequently, the silicon particles remaining inside the reactor tubeare contaminated and the fragments of the reactor tube make the processof disassembling difficult.

Because the silicon deposit accumulated on the inner wall of the reactortube reduces the productivity of the fluidized bed reactor and increasesthe production cost, a solution for this problem is needed.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 schematically illustrates the method for preparing granularpolycrystalline silicon in accordance with the present invention.

FIG. 2 schematically illustrates the silicon particle preparation stepof the present invention.

FIG. 3 schematically illustrates the silicon deposit removal step of thepresent invention.

FIG. 4 schematically illustrates another example of the silicon particlepreparation step of the present invention.

FIG. 5 schematically illustrates another example of the silicon depositremoval step of the present invention.

FIG. 6 schematically illustrates the various constructions of thefluidized bed reactor applicable to the preparation of granularpolycrystalline silicon in accordance with the present invention.

FIG. 7 schematically illustrates another various constructions of thefluidized bed reactor applicable to the preparation of granularpolycrystalline silicon in accordance with the present invention.

DISCLOSURE OF THE INVENTION

An object of the present invention is to provide a method for continualpreparation of polycrystalline silicon enabling effective removal ofsilicon deposit formed on the inner wall of the reactor tube of thefluidized bed reactor during the preparation of granular polycrystallinesilicon, and thus, enabling a stable, long-term operation of thefluidized bed reactor.

Hereunder is given a detailed description of the present invention.

To attain the afore-mentioned object, the present invention provides amethod for preparation of polycrystalline silicon using a fluidized bedreactor for preparation of granular polycrystalline silicon, in which areaction gas outlet of a reaction gas supplying means, that supplies asilicon-containing reaction gas so that silicon deposition may occurwhile the bed of silicon particles formed inside a reactor tube remainsfluidized, is located inside of the bed of silicon particles and, withthe outlet end as the reference height, the upper and lower spaces inthe reactor tube are respectively defined as a reaction zone providedfor silicon deposition by the reaction gas and a heating zone providedfor heating the silicon particles, and which comprises:

(i) a silicon particle preparation step, wherein the reaction gas issupplied by the reaction gas supplying means so that silicon depositionoccurs on the surface of the silicon particles in contact with thereaction gas, while silicon deposit is accumulated on the inner wall ofthe reactor tube encompassing the reaction zone;

(ii) a silicon particle partial discharging step, wherein, withoutrequiring the supply of the reaction gas, a part of the siliconparticles remaining inside the reactor tube is discharged out of thefluidized bed reactor so that the height of the bed of the siliconparticles does not exceed the height of the outlet; and

(iii) a silicon deposit removal step, wherein the silicon deposit isremoved by supplying an etching gas into the reaction zone, which reactswith the silicon deposit to form gaseous silicon compounds.

The present invention also relates to a method for preparation ofpolycrystalline silicon which further comprises (iv) a silicon particlereplenishing step, wherein, after removing the silicon deposit andterminating the supply of the etching gas, silicon particles arereplenished into the reactor tube to form a bed of silicon particles inthe reaction zone.

The present invention also relates to a method for preparation ofpolycrystalline silicon wherein the cycle comprising the steps (i),(ii), (iii) and (iv) is repeated.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which the fluidized bed reactor comprises areactor shell which encompasses the reactor tube, and the inner space ofthe reactor tube is defined as an inner zone where the bed of siliconparticles is present and the heating zone and the reaction zone areincluded, while the space between the reactor tube and the reactor shellis defined as an outer zone where the bed of silicon particles is notpresent and silicon deposition does not occur.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which (i) the silicon particle preparationstep comprises the sub-steps of:

supplying a fluidizing gas to the bed of silicon particles in theheating zone using a fluidizing gas supplying means so that the bed ofsilicon particles formed in the reaction zone becomes fluidized;

heating the silicon particles with a heating means equipped at the innerzone and/or the outer zone of the reactor tube;

discharging a part of the silicon particles prepared in the inner zoneout of the fluidized bed reactor using a particle discharging means; anddischarging an off-gas gas comprising the fluidizing gas, which passesthrough the bed of silicon particles, a non-reacted reaction gas and abyproduct gas out of the fluidized bed reactor using a gas dischargingmeans.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which an inert gas comprising at least oneselected from nitrogen, argon and helium is supplied to the outer zonein order to maintain the outer zone under an inert gas atmosphere.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which the difference of the pressure at theouter zone (P_(o)) and the pressure at the inner zone (P_(i)) ismaintained satisfying the condition of 0 bar≦|Po−Pi|≦1 bar.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which the etching gas comprises at least onechlorine-containing substance selected from silicon tetrachloride(SiCl₄), hydrogen chloride (HCl) and chlorine (Cl₂).

The present invention also relates to a method for preparation ofpolycrystalline silicon in which the etching gas further comprises atleast one substance selected from hydrogen, nitrogen, argon and helium.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which, in (i) the silicon particlepreparation step and/or (iii) the silicon deposit removal step, theabsolute pressure at the reaction zone is maintained at in the range of1-20 bar.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which (iii) the silicon deposit removal stepcomprises the sub-step of removing the silicon deposit formed at thereaction gas outlet of the reaction gas supplying means using theetching gas.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which (iii) the silicon deposit removal stepis carried out by supplying the etching gas using the reaction gassupplying means and/or an etching gas supplying means the outlet ofwhich is exposed to the reaction zone.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which, in (iii) the silicon deposit removalstep, a fluidizing gas is supplied to the bed of silicon particlesremained in the heating zone using a fluidizing gas supplying means sothat the bed of the silicon particles is maintained as a fixed bed inwhich the particles become immobile or as a fluidized bed in which apart of the particles remains fluidized.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which the fluidizing gas comprises at leastone substance selected from hydrogen, nitrogen, argon, helium, silicontetrachloride, trichlorosilane, dichlorosilane and hydrogen chloride.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which a fixed bed of packing materials thatare not fluidized by the fluidizing gas is formed in addition to the bedof silicon particles at the lower space of the heating zone.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which, in (iii) the silicon deposit removalstep, an etching-step off-gas including the fluidizing gas being passedthrough the bed of silicon particles, a non-reacted etching gas and/oran etching reaction product gas is discharged out of the fluidized bedreactor using a gas discharging means.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which the reaction gas comprises at least onesilicon-containing substance selected from monosilane (SiH₄),dichlorosilane (SiH₂Cl₂), trichlorosilane (SiHCl₃) and silicontetrachloride (SiCl₄).

The present invention also relates to a method for preparation ofpolycrystalline silicon in which, in (iii) the silicon deposit removalstep, the temperature of a part of the silicon deposit is maintainedwithin the range of 500-1,250° C.

The present invention also relates to a method for preparation ofpolycrystalline silicon in which, in (iii) the silicon deposit removalstep, the silicon deposit is heated by a heating means equipped at theinner zone of the reactor tube and/or at the outer zone.

Hereinafter, the present invention is described in detail referring tothe appended drawings.

As schematically illustrated in FIG. 2, in the preparation of granularpolycrystalline silicon using a fluidized bed reactor, the fluidized bedof silicon particles should be formed inside a reactor tube capable ofminimizing impurity contamination for preparation of high purity siliconparticles.

Including thermal decomposition and/or hydrogen reduction of thesilicon-containing reaction gas (11 r), silicon deposition reaction (Rd)occurs not only on the surface of hot silicon particles (3) in contactwith the reaction gas (11 r) but also, inevitably, on the inner wall ofthe reactor tube (2).

In the fluidized bed reactor of the present invention as illustrated inFIG. 2, a reaction gas outlet of a reaction gas supplying means (15 r),that supplies a silicon-containing reaction gas (11 r) so that silicondeposition may occur while the bed of silicon particles (3) formedinside a reactor tube (2) remains fluidized, is located inside of thebed of silicon particles (3) and, with the outlet end as the referenceheight, the upper and lower spaces in the reactor tube are respectivelydefined as a reaction zone (Z_(r)) provided for the silicon depositionreaction (Rd) by the reaction gas and a heating zone (Z_(h)) providedfor heating the silicon particles (3).

During a silicon preparation step in such a fluidized bed reactor, thereaction gas (11 r) is supplied through the reaction gas supplying means(15 r), silicon deposition occurs on the surface of the siliconparticles (3) in contact with the reaction gas (11 r). Here, silicondeposition also occurs at the reactor components encompassing thereaction zone (Z_(r)), i.e., on the inner wall of the reactor tube (2)and/or on the surface of the reaction gas outlet of the reaction gassupplying means (15 r). The thickness of the silicon deposit (D)increases with time, and then the inner diameter of the reaction zone(Z_(r)) decreases thereby.

As a result, the structural stability of the reactor tube (2) isdeteriorated greatly as it is exposed to the fluidization of hot siliconparticles (3). Thus, if the thickness of the silicon deposit (D) exceedsa predetermined allowable value, preparation of silicon particles by thesilicon deposition reaction (Rd) should be interrupted by terminatingthe supply of the reaction gas (11 r).

When the diameter of the reactor tube (2) of a fluidized bed reactor isincreased, the ratio of the area of the inner wall to the inner spacevolume becomes significantly lowered, resulting in slower accumulationof the silicon deposit (D) by silicon deposition (R_(d)). Consequently,it takes longer for the thickness of the silicon deposit (D) to reach anallowable maximum value. Thus, for large-scale fluidized bed reactorsused for commercial-scale production, the silicon particle preparationstep can be sustained for from a few days to several weeks.

When the thickness of the silicon deposit (D) reaches near the allowedmaximum value, the operation of silicon deposition is required to bestopped. It is conventional that, after the inside of the reactor iscooled down sufficiently by purging with an inert gas such as hydrogen,nitrogen, argon, helium, etc., all the cooled silicon particles (3) aredischarged out of the reactor, the reactor is disassembled, the reactortube (2) is replaced with a new one, and then the reactor is reassembledfor another silicon particles preparation step. On the contrary, thepresent invention makes it possible to resume silicon deposition afterremoving the silicon deposit (D) without the need of disassembling thefluidized bed reactor.

In accordance with the present invention, the silicon particlespreparation step is followed by a silicon particle partial dischargingstep, wherein, without requiring the supply of the reaction gas (11 r),a part of the silicon particles (3) remaining inside the reactor tube isdischarged out of the fluidized bed reactor so that the height of thebed of the residual silicon particles (3) within the reactor tube doesnot substantially exceed the height of the reaction gas outlet of thereaction gas supplying means (15 r).

Subsequently a silicon deposit removal step follows the silicon particlepartial discharging step. As illustrated in FIG. 3 or FIG. 5, an etchinggas (11 e) which is capable of reacting with the silicon deposit (D) andforming gaseous silicon compounds is supplied into the space of thereaction zone (Z_(r)), where the bed of silicon particles has beensubstantially removed, to effectively remove the silicon deposit (D) byetching reaction (R_(e)). In this silicon deposit removal step, thesilicon deposit (D) accumulated on the inner wall of the reactor tube(2) is removed, while the silicon deposit (D′) accumulated on thesurface of the reaction gas outlet of the reaction gas supplying means(15 r) may also be removed by its natural contact with the etching gas(11 e) introduced.

As described hereinbefore, the reaction gas outlet of the reaction gassupplying means (15 r), which supplies the silicon-containing reactiongas (11 r), is located inside of the bed of silicon particles (3) duringthe silicon particles preparation step, so that silicon deposition mayoccur in the fluidized bed of silicon particles (3) inside the reactortube (2). With the outlet end as the reference height, the upper andlower spaces in the reactor tube (2) are respectively defined as areaction zone (Z_(r)) provided for silicon deposition reaction (Rd) bythe reaction gas (11 r) and a heating zone (Z_(h)) provided for heatingthe silicon particles (3).

It is preferred that the silicon particle preparation step, in whichsilicon product particles are prepared by silicon deposition on thesurface of the silicon particles (3) in contact with the reaction gas(11 r) supplied by the reaction gas supplying means (15 r), can besustained as long as possible in the fluidized bed reactor. However,inevitably in this step, the silicon deposit (D) is also formed andaccumulated on the inner wall of the reactor tube (2) encompassing thereaction zone (Z_(r)).

In order to remove the silicon deposit (D), the present inventioncomprises a silicon particle partial discharging step in which, withoutrequiring the supply of the reaction gas, (11 r), a part of the siliconparticles (3) is discharged out of the fluidized bed reactor, so thatthe height of the bed of silicon particles (3) remaining inside thereactor tube (2) does not exceed the height of the outlet, and a silicondeposit removal step in which an etching gas (11 e), that reacts withthe silicon deposit (D) to form gaseous silicon compounds, is suppliedinto the space of the reaction zone (Z_(r)) for removing the silicondeposit (D).

Once the silicon deposit (D) accumulated on the inner wall of thereactor tube (2) is substantially removed with the etching gas via thesilicon deposit removal step, it is no more necessary to supply theetching gas (11 e) further.

After completion of the silicon deposit removal step and termination ofthe supply of the etching gas (11 e), a silicon particle replenishingstep follows in which silicon particles (3) substantially correspondingto the amount discharged out of the reactor during the silicon particlepartial discharging step are replenished into the reactor tube (2) toform a bed of silicon particles (3) in the reaction zone (Z_(r)).

Then, the silicon particle preparation step, in which silicon depositionoccurs on the surface of fluidized silicon particles (3) by supplyingthe reaction gas (11 r) into the reaction zone (Z_(r)) using thereaction gas supplying means (15 r), can be resumed.

To summarize, the present invention may ultimately provide a method forcontinual preparation of polycrystalline silicon following thesequential steps of: the step in which the reaction gas is supplied tothe reaction zone (Z_(r)) of the reactor tube (2), so that siliconparticles are prepared by silicon deposition on the surface of thesilicon particles (3) while the silicon deposit (D) is accumulated; thestep in which, without requiring the supply of the reaction gas, a partof the silicon particles is discharged out of the fluidized bed reactor;the step in which the etching gas is supplied into the reaction zone(Z_(r)) to remove the silicon deposit (D); and the step in which, afterthe supply of the etching gas is terminated, silicon particles arereplenished to the reaction zone (Z_(r)) inside the reactor tube (2).

At a high temperature around the reaction temperature of the silicondeposition (R_(d)), the rate of the etching reaction (R_(e)) of thesilicon deposit (D) with the etching gas (11 e) becomes very high. Thus,the silicon deposit removal step may be completed very rapidly withinfrom a few minutes to several hours.

Further, because the amount of the silicon particles to be dischargedduring the silicon particle partial discharging step is smaller than thetotal amount of the silicon particles residing in the reactor tube (2)during the silicon particle preparation step, the time required for thesilicon deposit removal step and the silicon particle replenishing stepis very short as compared with that required for the silicon particlepreparation step and is of little burden to the productivity of thereactor.

In accordance with the present invention, which offers a method forremoving the silicon deposit (D) during the preparation ofpolycrystalline silicon particles, it is possible to prepare siliconparticles by repeating the silicon deposition cycles with each cyclecomprising: (i) the silicon particle preparation step, (ii) the siliconparticle partial discharging step, (iii) the silicon deposit removalstep and (iv) the silicon particle replenishing step, as summarized inFIG. 1. According to this process, the reactor needs not be disassembledand the reactor tube (2) can be continuously used although the silicondeposit (D) is accumulated on the inner wall of the reactor tube (2) oron other components of the reactor during the silicon particlepreparation step. This is possible because the silicon deposit (D) canbe removed quickly without the need of disassembling the fluidized bedreactor. Then, through the silicon particle replenishing step, it isalso possible to execute silicon deposition cycles in a repeated mannerby quickly resuming the silicon particle preparation step.

When a continual preparation of polycrystalline silicon particles isachieved by repeated silicon deposition cycles according to the presentinvention, it is possible to relieve greatly the inevitable problemssuch as the accumulation of silicon deposit (D) at the reactorcomponents, the decreased reactor productivity resulting from thedisassembly and reassembly of the fluidized bed reactor and thesubsequent increase in production cost, thereby major advantages ofpreparing granular polycrystalline silicon by the fluidized beddeposition process being realized.

The reactor components that contact the hot silicon particles (4) andare exposed to the reaction gas (11 r) during the silicon particlepreparation step include such solid surfaces the inner wall of thereactor tube (2) and/or the reaction gas outlet of the reaction gassupplying means (15 r). As the etching gas (11 e) is supplied to thereaction zone (Z_(r)) during the silicon deposit removal step, not onlythe silicon deposit (D) accumulated on the inner wall of the reactortube (2) but also the silicon deposit (D′) accumulated at the reactiongas outlet of the reaction gas supplying means (15 r) is exposed to theetching gas (11 e) and removed by etching reaction (R_(e)). Thus, inaccordance with the present invention, not only the silicon deposit (D)accumulated on the inner wall of the reactor tube (2) but also thesilicon deposit (D′) accumulated at the reaction gas outlet of thereaction gas supplying means (15 r) can be removed by the etching gas(11 e).

As described above, the present invention can be applied to any type offluidized bed reactor in which the bed of the silicon particles (3) isdivided into the reaction zone (Z_(r)) and the heating zone (Z_(h)),with the outlet end of the reaction gas supplying means (15 r) beingtaken as the reference height. Thus, the present invention can be widelyapplied in the preparation of granular polycrystalline silicon.

For example, as schematically illustrated in FIG. 4 and FIG. 5, areactor tube (2) may be installed inside a reactor shell (1) having asuperior mechanical strength, so that the reactor shell (1) encompassesthe reactor tube (2). The inner space of the reactor tube (2) is definedas an inner zone (4) where the bed of silicon particles (3) is present.The inner zone (4) includes a heating zone (Z_(h)) and a reaction zone(Z_(r)). Meanwhile, the space between the reactor tube (2) and thereactor shell (1) is defined as an outer zone (5) where the bed ofsilicon particles is not present and silicon deposition reaction (R_(d))does not occur.

The silicon particle preparation step executed using the fluidized bedreactor may comprise the sub-steps of: supplying a fluidizing gas (10)to the bed of silicon particles (3) in the heating zone (Z_(h)) using afluidizing gas supplying means (14) so that the bed of silicon particles(3) formed in the reaction zone (Z_(r)) becomes fluidized; heating thesilicon particles (3) with a heating means (8 a, 8 b) equipped at theinner zone (4) and/or the outer zone (5) of the reactor tube (2);discharging a part of the silicon particles (3 b) prepared in the innerzone (4) out of the fluidized bed reactor using a particle dischargingmeans (16); and discharging an off-gas (13 r) comprising the fluidizinggas (10), which passes through the bed of silicon particles, anon-reacted reaction gas and a byproduct gas out of the fluidized bedreactor using a gas discharging means (17).

During the silicon deposit removal step, it is possible to remove thesilicon deposit by supplying the etching gas (11 e) to the reaction zone(Z_(r)) using a reaction gas supplying means (15 r) and/or an etchinggas supplying means (15 e) the outlet of which is exposed to thereaction zone (Z_(r)). For example, the etching gas (11 e) may besupplied to the reaction zone (Z_(r)) instead of the reaction gas (11 r)using the reaction gas supplying means (15 r) as an etching gassupplying means (15 e), as schematically illustrated in FIG. 3, in orderto carry out the silicon deposit removal step. In this case, thereaction gas supplying means (15 r), i.e., the etching gas supplyingmeans (15 e) may be constructed such that the reaction gas (11 r) andthe etching gas (11 e) can pass through the same route or nozzles, orsuch that the reaction gas (11 r) and the etching gas (11 e) can passthrough different routes or nozzles. Alternatively, as schematicallyillustrated in FIG. 5, the etching gas (11 e) may be supplied using anetching gas supplying means (15 e) which is equipped independently ofthe reaction gas supplying means (15 r) in the inner zone (4) of thefluidized bed reactor and the outlet of which is exposed to the reactionzone (Z_(r)). As an alternative, the silicon deposit removal step may becarried out by supplying the etching gas (11 e) to reaction zone (Z_(r))using both the reaction gas supplying means (15 r) and the etching gassupplying means (15 e).

The present invention is characterized in that the bed of siliconparticles (3) is always present in part or whole of the heating zone(Z_(h)) inside the reactor tube (2) in all the steps comprised in eachsilicon deposition cycle, that is, (i) the silicon particle preparationstep; (ii) the silicon particle partial discharging step; (iii) thesilicon deposit removal step; and (iv) the silicon particle replenishingstep.

During the silicon particle preparation step, it is required that thebed of silicon particles (3) be formed not only in the heating zone(Z_(h)) but also in the reaction zone (Z_(r)) and that the siliconparticles (3) in the two zones can be mixed with each other while atleast the silicon particles (3) present in the reaction zone (Z_(r))remain fluidized, as schematically illustrated in FIG. 2 or FIG. 4.

The bed of the silicon particles (3) present in the heating zone (Z_(h))may be a fixed bed, but it is preferred that a fluidizing gas (10) besupplied by a fluidizing gas supplying means (14) so that at least theparticles present at the upper part of the heating zone (Z_(h)) remainfluidized for effective exchange of the silicon particles between thetwo zones (Z_(r), Z_(h)).

During the silicon particle partial discharging step, the height of thebed of silicon particles (3) within the reactor tube (2) becomes loweredwith time to or below the height of the reaction gas outlet of thereaction gas supplying means (15 r). Although not necessary, anappropriate amount of the fluidizing gas (10) may be supplied forefficient discharge of the particles.

Fluidization of the silicon particles (3) as mentioned in the presentdescription means the possibility of a change in the spatial position ofthe silicon particles with time caused by the flow of gas through theparticles, the movement and evolution of gas bubbles, and/or the motionof neighboring particles.

During the silicon deposit removal step, the whole or part of the bed ofsilicon particles present in the heating zone (Z_(h)) may remain asfixed or partly fluidized by supplying the fluidizing gas (10) by thefluidizing gas supplying means (14).

And, during the silicon particle replenishing step, the whole or a partof the bed of silicon particles present in the heating zone (Z_(h)) mayremain as fixed or partly fluidized by supplying the fluidizing gas (10)by the fluidizing gas supplying means (14).

Meanwhile, during the silicon deposit removal step, it is required thatan etching-step off-gas (13 e) comprising the fluidizing gas beingpassed through the bed of silicon particles (3) be remained, and anon-reacted etching gas and/or an etching reaction product gas bedischarged out of the fluidized bed reactor using a gas dischargingmeans (17) as schematically illustrated in FIG. 5.

Since the fluidizing gas (10) used in the whole or a part of the silicondeposition cycles in accordance with the present invention passesthrough the bed of silicon particles (3) residing in the heating zone(Z_(h)) as illustrated in FIGS. 2-7, it should be purified to avoidcontamination of the silicon particles. Preferably, the fluidizing gas(10) is one not reacting with the silicon particles and is selected fromhydrogen, nitrogen, argon and helium. The fluidizing gas (10) mayfurther comprise a chlorine compound more dense and viscous than thenon-reactive gas components, which may be obtained during thepreparation of polycrystalline silicon or contained in the reactionbyproduct gas, such as silicon tetrachloride (SiCl₄), trichlorosilane(SiHCl₃), dichlorosilane (SiH₂Cl₂), hydrogen chloride (HCl), etc. Incase the chlorine compound is added to the non-reactive gas, it isrequired that the allowed content range of the chlorine compound bepredetermined through thermodynamic balance analysis or a simplepreliminary experiment, so that silicon deposition or silicon etchingcannot occur in a detectable level between the high purity siliconparticles (3), residing in the heating zone (Z_(h)), and the fluidizinggas (10). Thus, the fluidizing gas (10) used in the present inventionmay comprise at least one substance selected from hydrogen (H₂),nitrogen (N₂), argon (Ar), helium (He), silicon tetrachloride (SiCl₄),trichlorosilane (SiHCl₃), dichlorosilane (SiH₂Cl₂) and hydrogen chloride(HCl).

The fluidizing gas (10) mentioned in the present description representsa gas supplied by the fluidizing gas supplying means (14) into the bedof silicon particles (3) residing in the heating zone (Z_(h)). Asmentioned hereinbefore, the supply rate of the fluidizing gas (10) canbe adjusted differently at each step of a silicon deposition cycle.Accordingly, the supply of the fluidizing gas (10) does not necessarilycause the fluidization of the silicon particles (3).

In order to form, at least in part, the fluidized bed of siliconparticles (3) in the reaction zone (Z_(r)) and/or the heating zone(Z_(h)), a considerable amount of fluidizing gas (10) has to besupplied, and the load of the heating means (8 a, 8 b) for heating thegas increases accordingly. Thus, as schematically illustrated in FIG. 4and FIG. 5, it is optional to construct the fluidized bed reactor suchthat a fixed bed, i.e., a packed bed of non-fluidizable packingmaterials (22) is formed in addition to the bed of silicon particles (3)at the lower part of the heating zone (Z_(h)), so that the supply of thefluidizing gas (10) per unit time may not become excessive. In order toform the fixed bed of the packing materials (22), it is required thatthe average unit weight of the packing materials be at least 5-10 timeshigher than that of the silicon particles, the fixed bed be notphysically deformed by the movement or fluidization of the siliconparticles (3) and the material be selected so that impuritycontamination of the silicon particles (3) can be minimized. While thesilicon deposition cycles are repeated, the packing materials (22)remain almost stationary without being moved along with the siliconparticles (3) or discharged. Also, they can perform the function of agas distributing means for distributing the fluidizing gas (10) moreuniformly at the lower part of the heating zone (Z_(h)). Further, theirsurface can indirectly increase the heat transfer area of the heatingmeans (8 a) at the heating zone (Z_(h)) when they are installed togetherwith a heating means (8 a).

The reaction gas (11 r) supplied to the reaction zone (Z_(r)) during thesilicon particle preparation step should comprise a silicon-containingsubstance, so that silicon deposition may occur to yield granularpolycrystalline silicon. The reaction gas (11 r) may comprise at leastone substance selected from monosilane (SiH₄), dichlorosilane (SiH₂Cl₂),trichlorosilane (SiHCl₃) and silicon tetrachloride (SiCl₄). The reactiongas (11 r) may comprise only the afore-mentioned silicon depositionsource material. However, it may further comprise at least one gascomponent selected from hydrogen, nitrogen, argon, helium and hydrogenchloride (HCl). In addition to supplying the source material for silicondeposition, the reaction gas (11 r) contributes to the fluidization ofthe silicon particles (3) in the reaction zone (Z_(r)) together with thefluidizing gas (10).

The etching gas (11 e), which is supplied to the reaction zone (Z_(r))to remove the silicon deposit (D) by forming gaseous silicon compoundsthrough its reaction with the silicon deposit (D) during the silicondeposit removal step, may comprise at least one chlorine-containingsubstance selected from silicon tetrachloride (SiCl₄), hydrogen chloride(HCl) and chlorine (Cl₂).

The etching reaction (R_(e)) triggered by the etching gas (11 e) maycomprise: (1) trichlorosilane formation from a mixture of silicontetrachloride/silicon metal/hydrogen; (2) chlorosilane formation from amixture of silicon metal/hydrogen chloride or silicon metal/hydrogenchloride/hydrogen; and/or (3) chlorosilane formation from a mixture ofsilicon metal/chlorine. Other than the chlorine-containing substance,there are many compounds that can remove the silicon deposit throughtheir reaction with silicon. But, the chlorine-containing substance ispreferred in the present invention to prevent any impurity contaminationby limiting the chemical reactions involved in the repeated silicondeposition cycles within the Si—H—Cl system. The etching gas (11 e) usedin the present invention may comprise only the chlorine-containingsubstance. But, it may further comprise at least one substance selectedfrom hydrogen, nitrogen, argon and helium. If the content of thechlorine-containing substance in the etching gas mixture comprising thediluent gas is too low, the rate of etching reaction decreases. Thus, itis preferred not to dilute the etching gas supplied in the silicondeposit removal step too much. For example, if hydrogen chloride is usedas the chlorine-containing substance, it is preferred that the molarconcentration of the diluent gas do not exceed about 2-3 times that ofhydrogen chloride.

During the silicon particle preparation step, the reaction temperaturefor silicon deposition, or the temperature of the silicon particles,should be maintained high. While the reaction temperature for monosilaneis about 600-850° C., the temperature for trichlorosilane, which is morewidely used for commercial purpose, is as high as about 900-1,150° C.

During the silicon deposit removal step, it is preferred that thetemperature of the part of the silicon deposit (D) be kept within therange of from 500 to 1,250° C. in order to significantly increase therate of the etching reaction (R_(e)). At a temperature lower than 500°C., the etching reaction (R_(e)) of the silicon deposit (D) composed ofhigh purity silicon does not begin very quickly. At a temperature higherthan 1,250° C., the rate of the etching reaction (R_(e)) is very high,but it is highly likely that the wall of the reactor tube (2) covered bythe silicon deposit (D) be physically damaged by the reaction heatgenerated. In order to reduce the time required for the etching reaction(R_(e)), it is preferred to heat the silicon deposit (D) using a heatingmeans (8 a, 8 b) equipped at the inner zone (4) and/or the outer zone(5) during the silicon deposit removal step. Heating of the silicondeposit (D) using the heating means (8 a, 8 b) may be carried out notonly directly by radiation heating, but also indirectly by thefluidizing gas (10), the etching gas (11 e) and/or the bed of siliconparticles (3) heated by the heating means (8 a, 8 b). Once part of thesilicon deposit (D) is heated to 500-1,250° C., it is quickly removed bythe etching reaction (R_(e)) with the etching gas (11 e) and theremaining silicon deposit (D) may be heated in situ by the reaction heatof the etching reaction (R_(e)). Thus, it is not necessary to uniformlyheat the whole deposit.

For large-scale production of polycrystalline silicon particles byrepeating the silicon deposition cycles in accordance with the presentinvention, it is required to maximize the rate of silicon deposition inthe fluidized bed reactor and the rate of etching reaction (R_(e)) ofthe silicon deposit (D). Thus, it is preferred that the absolutepressure in the reaction zone (Z_(r)) be maintained within 1-20 barduring the silicon particle preparation step and/or the silicon depositremoval step. If absolute pressure (P_(i)) in the reaction zone (Z_(r))is lower than 1 bar, the rate of silicon deposition or etching reaction(R_(e)) is not high enough, making the process unproductive. Incontrast, if it is higher than 20 bar, it is difficult to maintain thereaction temperature even when many heating means (8 a, 8 b) areinstalled in the inner space of the reactor shell (1) to heat thesilicon particles (3). Thus, it is preferred that the absolute pressure(P_(i)) in the reaction zone (Z_(r)) be selected in the range of fromabout 1 to 20 bar.

Hereunder is given a detailed description of the construction of afluidized bed reactor which may effectively carry out (i) the siliconparticle preparation step; (ii) the silicon particle partial dischargingstep; (iii) the silicon deposit removal step; and (iv) the siliconparticle replenishing step in accordance with the present invention andmay improve the productivity in preparing polycrystalline siliconparticles by repeating the silicon deposition cycles in a continualmanner.

Based on the silicon particle preparation step of the present invention,FIG. 6 and FIG. 7 illustrate respectively in a comprehensive way theschematics of the embodiments of a fluidized bed reactor that can beused to prepare granular polycrystalline silicon by repeating silicondeposition cycles.

The fluidized bed reactor that can be used for the present inventioncomprises a reactor tube (2) and a reactor shell (1). The inner space ofthe reactor is isolated from the outside of the reactor by the reactorshell (1). The reactor shell (1) encompasses the reactor tube (2) whichis installed vertically in the inner space of the reactor. That is, thereactor tube (2) is installed vertically inside the reactor shell (1),so that the reactor shell (1) encompasses the reactor tube (2). Theinner space of the reactor tube (2) is defined as an inner zone (4) inwhich the bed of silicon particles (3) is present and silicon depositionoccurs. Further, the space between the reactor tube (2) and the reactorshell (1) is defined as an outer zone (5) in which the bed of siliconparticles (3) is not present and silicon deposition does not occur.

The reactor shell (1) may be made of a metallic material with reliablemechanical strength and easy processability such as carbon steel,stainless steel or other alloy steels. As set forth in FIG. 6 and FIG.7, the reactor shell (1) may be composed of several components (1 a, 1b, 1 c, 1 d) for convenience in fabrication, assembly and disassembly.

It is important to assemble the components of the reactor shell (1)using gaskets or sealing materials made of a variety of materials inorder to completely isolate the inside of the reactor from the outside.The components of the reactor shell (1) may be in the form of acylindrical pipe, a flange, a tube with fittings, a plate, a cone, anellipsoid or a double-wall jacket with a cooling medium flowing inbetween the walls, etc. The inner surface of each component may becoated with a protective layer or be additionally installed with aprotective wall in the form of tube or shaped liner, which may be madeof a metallic material or a non-metallic material such as organicpolymer, ceramic or quartz, etc.

Some of the components of the reactor shell (1), illustrated as 1 a, 1b, 1 c and 1 d in FIG. 6 and FIG. 7, are preferred to be maintainedbelow a certain temperature by using a cooling medium such as water,oil, gas and air for protecting the equipment or operators, or forpreventing any thermal expansion in equipment or a safety accident.Although not shown in FIG. 6 and FIG. 7, the components that need to becooled are preferably designed to comprise a coolant-circulating meansat their inner or outer walls. Alternatively, an insulation material maybe equipped on the outer surface of the reactor shell (1) for protectionof operators and prevention of excessive heat loss.

The reactor tube (2) may be of any shape only if it can be hold by thereactor shell (1) in such a manner that it can separate the inner spaceof the reactor shell (1) into an inner zone (4) and an outer zone (5).The reactor tube (2) may have the form of a simple straight tube as inFIG. 6, a shaped tube as in FIG. 7, a cone or an ellipsoid, and eitherone end or both ends of the reactor tube (2) may be formed into a flangeshape. Further, the reactor tube (2) may comprise a plurality ofcomponents and some of these components may be installed in the form ofa liner along the inner wall of the reactor shell (1).

The reactor tube (2) is preferably made of an inorganic material, whichis stable at a relatively high temperature, such as quartz, silica,silicon nitride, boron nitride, silicon carbide, graphite, silicon,glassy carbon and composite material thereof. Here a carbon-containingmaterial such as silicon carbide, graphite, glassy carbon, etc., maygenerate carbon impurity and contaminate the polycrystalline siliconparticles. Thus, if the reactor tube (2) is made of a carbon-containingmaterial, the inner wall of the reactor tube (2) is preferred to becoated or lined with materials such as silicon, silica, quartz orsilicon nitride. Then, the reactor tube (2) may be structured in amulti-layered form. Therefore, the reactor tube (2) is of one-layered ormultilayered structure in the thickness direction, each layer of whichis made of a different material.

The selection of a sealing means (41 a, 41 b) may be important for thereactor tube (2) to be safely hold by the reactor shell (1). The sealingmeans are preferred to endure the high temperature of about 200° C. orabove and may be selected from organic polymers, graphites, silicas,ceramics, metals or composite materials thereof. However, consideringthe vibration and thermal expansion during reactor operation, thesealing means (41 a, 41 b) may be installed not too firmly so that thepossibility of cracking of the reactor tube (2) can be lowered duringassembly, operation and disassembly.

The partition of the inner space of the reactor shell (1) by the reactortube (2) may prevent the silicon particles (3) in the inner zone (4)from leaking into the outer zone (5) and differentiate the function andcondition between the inner zone (4) and the outer zone (5).

During the silicon particle preparation step, the silicon particles (3)present in the inner zone (4) should be heated to a temperature requiredfor silicon deposition by the heating means (8 a, 8 b) equipped at theinner zone (4) and/or the outer zone (5). One or a plurality of heatingmeans (8 a, 8 b) may be installed in the inner zone (4) and/or the outerzone (5) in various manners. For example, a heating means may beinstalled only in the inner zone (4) or in the outer zone (5) asillustrated in FIG. 6 in a comprehensive manner. Meanwhile, a pluralityof heating means may be installed in both zones, or only in the outerzone 5 as illustrated in FIG. 7. Besides, although not illustrated inDrawings, a plurality of heating means (8 a, 8 b) may be installed onlyin the inner zone (4). Otherwise, a single or a plurality of heatingmeans may be installed in the outer zone 5 only.

Electrical energy is supplied to the heating means (8 a, 8 b) by anelectric energy supplying means (9 a-9 f) installed as coupled with thereactor shell (1). The electric energy supplying means (9), whichconnects the heating means (8 a, 8 b) in the reactor with an electricsource (E) located outside the reactor, may comprise various types ofelectrically conducting materials as followings: (i) a well conductingmetallic material in the form of a cable, a bar, a rod, a shaped body, asocket, a coupler, etc.; a graphite, a ceramic (e.g., silicon carbide),a metal or a mixture thereof in the form of various electrodes thatconnect the power lines from the electric source (E) with the heatingmeans. Alternatively, the electric energy supplying means can beprepared by extending a part of the heating means (8 a, 8 b). Incombining the electric energy supplying means (9 a-9 f) with the reactorshell (1), electrical insulation is also important besides themechanical sealing for preventing gas leak. Further, it is desirable tocool down the electric energy supplying means (9) by using a circulatingcooling medium such as water, oil, or gas, etc., in order to preventoverheating caused by heat transfer from the heating means (9) orspontaneous generation and accumulation of heat.

During the silicon particle preparation step of the present invention,the fluidized bed of the silicon particles (3), which are moved by gasflow, is formed inside the reactor tube (2), at least in the reactionzone (Z_(r)), and silicon deposition occurs on the surface of thefluidizing silicon particles resulting in preparation of siliconparticles, i.e., granular silicon product. For this purpose, it isrequired that a fluidizing gas supplying means (14, 14′) which suppliesthe fluidizing gas (10) to the bed of silicon particles and a reactiongas supplying means (15 r) which supplies the silicon-containingreaction gas (11 r) are installed as coupled with the reactor shell (1b).

An etching gas supplying means (15 e) may be installed at the fluidizedbed reactor, as illustrated in FIG. 4 and FIG. 5. Alternatively, thereaction gas supplying means (15 r) may be used to supply the etchinggas (11 e) during the silicon deposit removal step, as illustrated inFIG. 2 and FIG. 3.

The reaction gas supplying means (15 r) may have a simple structure, asillustrated in FIGS. 2-7. But, because the reaction gas (11 r) issensitive to high temperature, various and complicated structures may beadopted [see U.S. Pat. No. 5,810,934 (1998); U.S. Pat. No. 6,541,377(2003)].

When the reaction gas supplying means (15 r) is used to supply theetching gas (11 e) during the silicon deposit removal step, the reactiongas (11 r) and the etching gas (11 e) may be rendered to pass the samepaths or nozzles, as illustrated in FIG. 2, FIG. 3, FIG. 6 and FIG. 7.Alternatively, the reaction gas supplying means (15 r) may have aplurality of gas paths or nozzles, so that the reaction gas (11 r) andthe etching gas (11 e) can pass through different paths or nozzles.

Each of the fluidizing gas supplying means (14, 14′) and the reactiongas supplying means (15 r) may be composed of such components as a tubeor nozzle, a chamber, a flange, a fitting, a gasket, etc. Especially,the components which may contact the silicon particles (3) inside thereactor shell (1), particularly at the lower part of the inner zone (4),are preferably composed of a tube, a liner or a shaped body made of theinorganic material used to make the reactor tube (2).

Further, at the lower part (4 a) of the fluidized bed of siliconparticles inside the reactor inner zone (4), a gas distributing means(19), which distributes the fluidizing gas (10), is preferably equippedalong with the fluidizing gas supplying means (14, 14′) and the reactiongas supplying means (15 r). The gas distributing means (19) may be inthe form of a multi-hole or porous distribution plate, a packingmaterial (22), a nozzle, a gas distributor shaped body or a combinationthereof, without being limited to a specific form. The components of thegas distributing means (19) which may contact the silicon particles (3),e.g., its upper surface, are preferably made of an inorganic materialused to make the reactor tube (2).

The reaction gas outlet of the reaction gas supplying means (15 r),which introduces or injects the reaction gas (11 r) into the fluidizedbed, is preferably positioned higher than the upper surface of the gasdistributing means (19), in order to prevent silicon deposition on theupper surface of the gas distributing means (19).

During the silicon particle preparation step, the fluidizing gas (10),required to form the fluidized bed of the silicon particles (3) at leastin the reaction zone (Z_(r)), may be supplied in a variety of ways,depending on the construction of the fluidizing gas supplying means (14,14′). For example, the fluidizing gas (10) may be supplied by afluidizing gas supplying means (14, 14′) comprising a gas chamber (14′)is formed below a plate-type gas distributing means (19) and is coupledwith the reactor shell (1), as illustrated in FIGS. 4, 5 and 6.Alternatively, as illustrated in FIG. 4 and FIG. 5, the fixed bed of thepacking materials (22), which is not moved by the fluidizing gas (10),may be utilized as a part of the gas distributing means. As anotherexample, as illustrated in FIG. 7, a fluidizing gas (10) may be suppliedby a fluidizing gas supplying means (14) coupled with the reactor shell(1) so that one or a plurality of fluidizing gas nozzle outlet may bepositioned in between the gas distributing means (19) that comprises afixed bed of packing materials that will not be contained in thefluidizing granular silicon product (3 b). Meanwhile, the gasdistributing means (19) may comprise at least two components selectedfrom a distribution plate, a nozzle, packing materials (22) and a gasdistributor shaped body. For example, in addition to the fluidizing gassupplying distribution plate and/or nozzle, the gas distributing means(19) may comprise the fixed bed of the packing materials (22) other thanthe silicon particles (3) to be contained in the silicon productparticles (3 b).

The packing materials (22) have such a large size or sufficient unitmass as not to be moved by the flow of the fluidizing gas (10). They mayhave the shape of a sphere, an oval, a pellet, a nugget, a tube, a rodor a ring. Preferably, the packing material (22) is a high puritysilicon material, having an average diameter in the range of from 5 to50 mm and an average unit weight of at least about 5-10 times that of anaverage-sized silicon particle (3), or an inorganic material that can beused for or layered on the reactor tube (2).

In case the fixed bed of the packing material (22) which is not mobileby the flow of the fluidizing gas (10) constitutes the gas distributingmeans (19), the fixed bed is preferably formed at a height lower thanthe reaction gas outlet of the reaction gas supplying means (15 r), thatis, at the lower part of the heating zone (Z_(h)). Once the fixed bed isformed in the heating zone (Z_(h)), movement of the silicon particlesand flow of the fluidizing gas may occur through the space between thepacking materials (22). But, there is an advantage that the heattransferred from the bed of the silicon particles (3) heated by theheating means (8 a, 8 b) downward to the lower part of the reactor maybe utilized for pre-heating the fluidizing gas (10).

During the silicon particle preparation step, the fluidizing siliconparticles (3) heated directly or indirectly by the heating means (8 a, 8b) can contact and be exposed to the reaction gas (11 r) supplied by thereaction gas supplying means (15 r) while residing temporarily or over asubstantial period of time or with a regular or irregular fluctuatingfrequency in the reaction zone (Z_(r)). This results in silicondeposition on the surface of the fluidizing silicon particles andproduction of granular polycrystalline silicon. At the same time,silicon deposition occurs on the inner wall of the reactor tube (2),which encompasses the reaction zone (Z_(r)) and contacts the hot siliconparticles (3) and reaction gas (11 r), and is accumulated thereon toform a silicon deposit (D), which increases in thickness and volume astime passes.

Not only during the silicon particle preparation step, but also duringthe silicon particle partial discharging step, silicon deposit removalstep and/or silicon particle replenishing step, the gas distributingmeans (19) and the fluidizing gas supplying means (14) enable supply ofthe fluidizing gas (10) to the inner zone (4), particularly to theheating zone (Z_(h)). However, unlike the silicon particle preparationstep, it is not necessary to supply the fluidizing gas (10) in largequantity during the other steps, because the silicon particles need notalways be maintained fluidized in the inner zone (4).

For continuous production of silicon particles, it is preferable todischarge or withdraw a part of the silicon particles prepared duringthe silicon particle preparation step from the inner zone (4) of thefluidized bed reactor and replenish silicon seed crystals (3 a) to theinner zone (4) in order to maintain the number and average particlediameter of the silicon particles (3) as constant as possible in theinner zone (4).

Therefore, a particle discharging means (16) for discharging thepolycrystalline silicon particles needs to be installed as coupled withthe reactor shell (1). The discharge pipe of the particle dischargingmeans (16) may be assembled along with the reaction gas supplying means(15 r) as in FIG. 6 or may be installed independently of the reactiongas supplying means (15 r) as in FIG. 4, 5 or 7, so that the siliconparticles (3 b) can be discharged from the inner zone (4) at the righttime, continuously, periodically or intermittently. Alternatively, anindependent space may be coupled with the reactor shell (1), so that thesilicon particles (3 b) can be cooled before being discharged out of thereactor, while remaining at a part or at the bottom of the space of thefluidizing gas supplying means (14′) as shown in FIG. 6. A part of thesilicon particles discharged from the inner zone (4) during the siliconparticle preparation step, or the silicon product particles (3 b), maybe transferred to a polycrystalline silicon product storage means orhandling means directly connected with the reactor.

Of the silicon product particles (3 b) produced during the siliconparticle preparation step, the small sized ones can be readily utilizedas seed crystals (3 a). Accordingly, it is also possible to transfer thesilicon product particles (3 b) discharged from the inner zone (4) to aclassifying means that can classify the particles depending on size, inorder to transfer large particles to the polycrystalline silicon productstorage means or handling means and use small particles as seed crystals(3 a).

Further, the silicon particles (3 b) are preferably cooled while beingdischarged by the particle discharging means (16) because the reactorinner zone (4) or the fluidized bed (4 a) of silicon particles is hot.For this purpose, hydrogen, nitrogen, argon, helium or other gas may beflown through the particle discharging means (16) or a cooling mediumsuch as water, oil, gas, etc., may be circulated along the wall of theparticle discharging means (16). Besides, although not shown indrawings, the particle discharging means (16) may be equipped as coupledwith the inside of the reactor shell (1) (e.g., 14′ of FIG. 6) or thebottom of the reactor shell (e.g., 1 b of FIG. 6 or FIG. 7) in order toprovide a sufficient space, so that the silicon particles (3 b) aredischarged out of the fluidized bed reactor after being sufficientlycooled while remaining in the fluidized bed (4 a).

It is required to prevent the silicon product particles (3 b) from beingcontaminated by impurities while they are discharged out of the reactorby the particle discharging means (16). Thus, it is preferable toconstruct the components of the particle discharging means (16), whichcan be exposed to or contact the hot silicon product particles (3 b), inthe form of a tube, a liner or a shaped body made of the inorganicmaterial that may be used for the reactor tube (2).

Such components of the particle discharging means (16) need to be fixedas coupled with the reactor shell (1) and/or a protection tube made of ametallic material. Instead of the inorganic material, the components ofthe particle discharging means (16), which contact substantially cooledsilicon particles or the wall of which can be cooled by a coolingmedium, may consists of a tube, a liner or a shaped body made of ametallic material coated or lined with a fluorine-containing polymermaterial on the inner wall.

As described above, the silicon product particles (3 b) may bedischarged continuously, periodically or intermittently from the reactorinner zone (4) to the polycrystalline silicon product storage means orhandling means by the particle discharging means (16).

It is also possible to equip the classifying means between the reactorand the product storage means to classify the silicon product particles(3 b) depending on size and utilize small particles as seed crystals (3a).

A variety of industrially available particle separation devices may beused or modified for the classifying means. But, in order to preventcontamination during the separation of the particles, the components ofthe classifying means that contact the silicon product particles (3 b)is preferably made of a material used in the particle discharging means(16) or a pure polymeric material with no additive or filler added.

As well as in the silicon particle preparation step, the particledischarging means (16) may be also utilized in the silicon particlepartial discharging step as a means of discharging a part of the siliconparticles (3) from the inner zone (4), so that the height of the bed ofthe remaining silicon particles (3) cannot exceed that of the outlet ofthe reaction gas supplying means (15 r). Alternatively, withoutrequiring the supply of the reaction gas (11 r), the partial dischargingstep can also be performed by discharging a part of the siliconparticles (3) from the inner zone (4) through the reaction gas supplyingmeans (15 r) on behalf of the particle discharging means (16). In thiscase, although not shown in drawings, a container for temporarilystoring the silicon particles (3) may be equipped at the bottom of thereaction gas supplying means (15 r), so that the silicon particlesremaining in the reaction zone (Z_(r)) can fall into the container withan appropriate amount of an inert gas, instead of the reaction gas (11r), being supplied into the inner zone (4). Meanwhile, part of thesilicon particles (3) remaining in the inner zone (4) may be dischargedto the container through the reaction gas supplying means (15 r) bysupplying the fluidizing gas (10) to the heating zone (Z_(h)), so thatthe height of the bed of the silicon particles can be lowered down to apredetermined value.

For the continuous operation of the fluidized bed reactor during thesilicon particle preparation step, it is required to couple the gasdischarging means (17) with the reactor shell (1 d) for discharging anoff-gas (13), including the fluidizing gas being passed through thefluidized bed (4 a), a non-reacted reaction gas and a byproduct gas, outof the fluidized bed reactor via the top of the inner zone (4 c).

Fine silicon powders or high-molecular-weight reaction byproductsentrained by the off-gas (13) are separated by a off-gas treating means(34). The off-gas treating means (34), selected among a cyclone, afilter, a packing tower, a scrubber, a centrifuge, etc., may be equippedeither outside of the reactor shell (1) or at the upper space (4 c) ofthe inner zone within the reactor shell (1), as illustrated in FIG. 6 orFIG. 7. The silicon particles separated by the off-gas treating means(34) may be recycled to the fluidized bed (4 a) in the inner zone of thereactor for use as seed crystals (3 a) or may be utilized for otherpurposes.

The gas discharging means (17) enables discharging of the fluidizing gas(10), the inert gas supplied to the inner zone (4) and/or the gascomponents remaining in the inner zone (4) not only during the siliconparticle preparation step, but also during the silicon particle partialdischarging step, the silicon deposit removal step and the siliconparticle replenishing step. Particularly, during the silicon depositremoval step, a mixture of a non-reacted etching gas, etching reaction(R_(e)) byproducts, and/or the fluidizing gas (10), etc., may bedischarged by the gas discharging means (17).

For continuous preparation of silicon particles, it is preferable tomaintain the number of silicon particles comprising the fluidized bed (4a) and the average particle size thereof within a certain range. Thus,it is preferred to replenish seed crystals (3 a) into the fluidized bed(4 a) roughly corresponding to the number of the silicon particles (3 b)discharged as product. As described above, although the siliconparticles or powders of an appropriate size separated by the off-gastreating means (34) can be used as seed crystal, the amount isrestricted. Thus, a further preparation or manufacture of silicon seedcrystals is inevitable for continuous production of silicon particles.In this regard, a way of separating small silicon particles from theproduct particles (3 b) and utilizing them as seed crystals (3 a) can beconsidered. However, the process of separating the seed crystals (3 a)from the product particles (3 b) outside the fluidized bed reactor iscomplicated and vulnerable to contamination by impurities.

Instead of separating product particles (3 b), a classifying means maybe equipped at the particle discharge path of the particle dischargingmeans (16), so that small silicon particles can be recycled back intothe fluidized bed (4 a) by the gas flowing upward for cooling down theproduct particles (3 b) during their discharge, thereby reducing therequirement of seed crystal supply, increasing the average particle sizeof the product particles (3 b) and reducing particle size distributionin the product particles.

In general, silicon seed crystals are prepared by pulverizing some ofthe silicon product particles (3 b) discharged by the particledischarging means (16) with a pulverizing apparatus. The seed crystals(3 a) may be supplied continuously, periodically or intermittently atthe right time into the reactor inner zone (4) through a seed crystalsupplying means (18) installed as coupled with the reactor shell (1 d),as illustrated in FIG. 6. This method is advantageous in that the sizeand feeding rate of the seed crystals (3 a) can be adjusted as required.However, it is disadvantageous in that an independent pulverizingapparatus is required. Alternatively, the silicon particles may bepulverized into seed crystals inside the fluidized bed (4 a) by usingthe reaction gas outlet nozzle of the reaction gas supplying means (15r) or an additionally installed gas nozzle for a high-speed gas jetinside the fluidized bed allowing particle pulverization. This method iseconomical because no additional pulverizing apparatus is required.However, it is disadvantageous in that it is difficult to control thesize and rate of generation of the seed crystals.

The silicon particles discharged during the silicon particle partialdischarging step may be contained in product particles (3 b) or putaside and supplied to the inner zone (4) through the seed crystalsupplying means (18) during the silicon particle replenishing step.Otherwise, instead of the silicon particles discharged during thesilicon particle partial discharging step, the independently preparedsilicon seed crystals (3 a) may be supplied to the inner zone (4)through the seed crystal supplying means (18) during the siliconparticle replenishing step.

During the silicon particle preparation step as described above, theinner zone (4) comprises all spaces required for forming the bed ofsilicon particles (3) wherein the fluidizing gas (10) and the reactiongas (11 r) are supplied and silicon deposition occurs, and required forflowing and discharging of the off-gas (13) including the fluidizinggas, a non-reacted reaction gas and a byproduct gas. Therefore, theinner zone (4) plays an important role in producing polycrystallinesilicon particles by silicon deposition in the fluidized bed of siliconparticles (3).

In contrast, the outer zone (5) is an independently formed space inbetween the outer wall of the reactor tube (2) and the reactor shell(1), in which the bed of silicon particles (3) is not present andsilicon deposition does not occur. Thus, the outer zone (5) as mentionedin this description is the space of the inner space of the reactor shell(1) excluding the inner zone (4) or is formed in between the reactortube (2) and the reactor shell (1).

An inert gas is supplied to the outer zone (5) to maintain the outerzone under an inert gas atmosphere. The reason of maintaining the outerzone (5) under an inert gas atmosphere and several important roles ofthe outer zone (5) are as follows. First, the outer zone (5) provides aspace for protecting the reactor tube (2), which is accomplished bymaintaining a pressure difference between the inner zone (4) and theouter zone (5) within a certain range. Second, the outer zone (5)provides a space for installing an insulation material (6) forpreventing or reducing heat loss from the reactor. Third, the outer zone(5) provides a space for installing a heating means, if required, aroundthe reactor tube (2) for heating the reactor. Fourth, the outer zone (5)provides a space for maintaining a substantially inert gas atmosphereoutside the reactor tube (2) to prevent dangerous gas containing oxygenand impurities from being introduced into the inner zone (4), and forsafely installing and maintaining the reactor tube (2) inside thereactor shell (1). Fifth, the outer zone (5) allows a real-timemonitoring of the status of the reactor tube (2) during operation. Theanalysis or measurement of the outer-zone gas sample from the outer zoneconnection means (28, 28 a, 28 b) may reveal the presence orconcentration of a gas component that may exist in the inner zone (4),the change of which may indirectly reveal an accident at the reactortube. Sixth, as illustrated in FIG. 7, the outer zone (5) may provide aspace for installing a heating means for heating the silicon deposit (D)accumulated on the inner wall of the reactor tube (2) so that thedeposit can be removed rapidly by introducing an etching gas (11 e) intothe reaction zone (Z_(r)). Lastly, the outer zone (5) facilitatesassembly and disassembly of the reactor tube (2) and the inner zone (4).

Since the outer zone (5) plays various important roles, the space of theouter zone may be partitioned into several sections in an up-and-downand/or a radial or circumferential direction, utilizing one or more oftubes, plates, shaped bodies or fittings as partitioning means. When theouter zone (5) is further partitioned according to the presentinvention, the divided sections are preferred to spatially communicatewith each other while having substantially the same atmosphericcondition and pressure.

An insulation material (6), which may be installed in the outer zone (5)for greatly reducing heat transfer via radiation or conduction, may beselected from industrially acceptable inorganic materials in the form ofa cylinder, a block, fabric, a blanket, a felt, a foamed product, or apacking filler material.

The heating means (8), which is connected to an electric energysupplying means (9) coupled with the reactor shell (1) for maintainingthe reaction temperature in the fluidized bed reactor, may be installedeither in the outer zone (5) or in the inner zone (4). Particularly, theheating means may be installed inside the bed of the silicon particles(3). If necessary, the heating means (8 a, 8 b) may be installed both inthe inner zone (4) and the outer zone (5), as illustrated in FIG. 6.Alternatively, the heating means (8 b) may be installed in the outerzone (5) only, as illustrated in FIG. 7. The whole or part of theheating means (8 a, 8 b) may be also utilized to heat the silicondeposit (D) directly or indirectly during the silicon deposit removalstep.

When a plurality of heating means (8 a, 8 b) is installed in thefluidized bed reactor, they may be electrically connected to an electricsource (E) in series and/or in parallel. Or, as illustrated in FIG. 6 orFIG. 7, the power supplying systems respectively comprising the electricsource (E) and the electric energy supplying means (9 a, 9 b, 9 c, 9 d,9 e, 9 f) may be constructed independently.

As illustrated in FIG. 6, if the heating means (8 a) is installed insidethe bed of silicon particles (3), the silicon particles can be directlyheated in the inner zone (4). In this case, it is preferred that theheating means (8 a) be positioned lower than the reaction gas outlet ofthe reaction gas supplying means (15 r) in order to prevent silicondeposition on the surface of the heating means (8 a) and itsaccumulation thereon.

Further, as schematically illustrated in FIG. 6 and FIG. 7, it is alsopreferred to supply an inert gas (12) comprising at least one substanceselected from nitrogen, argon and helium to the outer zone (5) tomaintain the outer zone (5) under an inert gas atmosphere. Preferably,this manipulation is performed in all steps of the silicon depositioncycles in accordance with the present invention. For this purpose, it isrequired to install an inert gas connection means (26 a, 26 b) at thereactor shell (1), as illustrated in FIG. 6 and FIG. 7, to maintain theouter zone (5) under an inert gas atmosphere, without regard to thesilicon deposition reaction (Rd) or etching reaction (R_(e)) occurringin the inner zone (4). The inert gas connection means (26 a, 26 b),which is installed at, on or through the reactor shell (1) and isspatially connected with the outer zone (5), has the function of pipingconnection for supply or discharge of the inert gas (12). It may be inthe form of a tube, a nozzle, a flange, a valve, a fitting, etc., or acombination thereof.

Independently of the inert gas connection means (26 a, 26 b), an outerzone connection means (28, 28 a, 28 b) may also be installed at the partof the reactor shell (1) spatially exposed directly or indirectly to theouter zone (5), being used for measurement and/or control of flow rate,temperature, pressure and/or gas composition.

The outer zone (5) can be maintained under an inert gas atmosphere witha single inert gas connection means. However, two or more inert gasconnection means (26 a, 26 b) may be used to perform the supply anddischarge of the inert gas independently. In addition to maintaining theouter zone (5) under an inert gas atmosphere, the inert gas connectionmeans (26 a, 26 b) may be utilized for measurement and/or control offlow rate, temperature, pressure, and/or gas composition, which may alsobe performed using the outer zone connection means (28, 28 a, 28 b).

As illustrated in FIG. 6 and FIG. 7 in a comprehensive way, it ispossible to measure or control the pressure (P_(o)) at the outer zone(5) using the inert gas connection means (26 a, 26 b) or the outer zoneconnection means (28, 28 a, 28 b). The outer zone connection means (28,28 a, 28 b), which may be installed independently of the inert gasconnection means (26 a, 26 b), is installed for measurement and/orcontrol the maintenance of the outer zone (5). The outer zone connectionmeans (28, 28 a, 28 b) may also be in the form of a tube, a nozzle, aflange, a valve, a fitting, etc. or a combination thereof. In theabsence of the inert gas connection means (26 a, 26 b), the outer zoneconnection means (28, 28 a, 28 b) may be utilized for the supply ordischarge of the inert gas (12), in addition to the measurement and/orcontrol of temperature, pressure and/or gas composition. Therefore, itis not necessary to differentiate the inert gas connection means (26 a,26 b) from the outer zone connection means (28, 28 a, 28 b) in respectof shape and function.

In contrast with the outer zone (5), where the pressure can bemaintained almost constant irrespective of location and time, the innerzone (4) has a different pressure at a different height of the fluidizedbed of the silicon particles (3). Thus, the pressure (P_(i)) of theinner zone (4) is different depending on the location. Although thepressure drop imposed by the fluidized bed of solid particles depends onthe height of the fluidized bed, it is common to maintain the pressuredrop by fluidized bed less than about 0.5-1 bar unless the height of thefluidized bed is extremely high. Further, irregular fluctuation of thepressure is inevitable with time due to the nature of the fluidizationof solid particles. Thus, pressure may vary in the inner zone (4)depending on location and time.

Considering these natures, the pressure controlling means for the innerpressure, i.e., the inner pressure controlling means for directly orindirectly measuring and/or controlling pressure (P_(i)) in the innerzone (4) may be installed at such a point among various locations thatit may be spatially connected to the inner zone (4). Pressurecontrolling means according to the present invention, i.e., the innerpressure controlling means and the outer pressure controlling means maybe installed on or through various positions depending on the details ofthe reactor assembly as well as on the operational parameters to becontrolled. The inner pressure controlling means may be spatiallyconnected to the inner zone (4) through the inner zone connection means(24, 25) or the fluidizing gas supplying means (14) or the reaction gassupplying means (15 r) or the particle discharging means (16) or the gasdischarging means (17), etc., which are spatially exposed directly orindirectly to the inner zone (4). Meanwhile, the pressure controllingmeans for the outer pressure, i.e., the outer pressure controlling meansmay be spatially connected to the outer zone (5) through the outer zoneconnection means (28, 28 a, 28 b) or the inert gas connection means (26a, 26 b), etc., which are installed on or through the reactor shell (1)and spatially exposed to the outer zone (5) directly or indirectly.

The inner pressure controlling means and/or the outer pressurecontrolling means may be in the form of at lest one selected from (i) aconnection pipe or fitting for spatial connection; (ii) a manual,semi-automatic or automatic valve; (iii) a digital- or analog-typepressure gauge or differential-pressure gauge; (iv) a pressure indicatoror recorder; (v) an element constituting a controller with a signalconverter or an arithmetic processor.

The inner pressure controlling means and/or the outer pressurecontrolling means may be connected with each other in the form of amechanical assembly or a signal circuit. Further, either of the pressurecontrolling means may be partially or completely integrated with acontrol system selected from the group consisting of a central controlsystem, a distributed control system and a local control system.

Although the inner pressure controlling means and outer pressurecontrolling means may be independently constituted in terms of pressure,either of the pressure controlling means may be partially or completelyintegrated with a means for measuring or controlling a parameterselected from the group consisting of flow rate, temperature, gascomposition, particle concentration, etc. Meanwhile, either of thecontrolling means may further comprise a separation device such as afilter or a scrubber for separating particles, or a container forpressure damping. This protects the component of the pressurecontrolling means from contamination by impurities, and also provides ameans to damp pressure changes.

As an example, the inner pressure controlling means may be installed ator connected to the inner zone connecting means (24, 25) that isinstalled on or through the reactor shell (1) spatially exposed directlyor indirectly to an inner zone (4) for measurement of pressure,temperature or gas component or for viewing inside the reactor. Byconstructing the inner pressure controlling means so that it may beconnected to the inner zone connecting means (24, 25), pressure in theupper part of the inner zone (4 c) may be stably measured and/orcontrolled although it is difficult to detect the time-dependentpressure fluctuation due to the fluidized bed of silicon particles. Formore accurate detection of the time-dependent pressure fluctuationrelated with the fluidized bed, the inner zone connecting means may beinstalled so that it may be spatially connected to the inside of thefluidized bed. The inner pressure controlling means may also beinstalled at or connected to other appropriate positions, i.e., afluidizing gas supplying means (14) or a reaction gas supplying means(15 r) or a particle discharging means (16) or a gas discharging means(17), etc., all of which are coupled with the reactor shell (1) thusbeing spatially connected to the inner zone (4). Further, a plurality ofinner pressure controlling means may be installed at two or moreappropriate positions that can be spatially connected with the innerzone connecting means (24, 25) and/or the inner zone (4).

As mentioned above, the presence of silicon particles affects the innerpressure, Pi. Thus, the measured value of Pi varies according to theposition where the inner pressure controlling means (30) is installed.According to the experimental observations by the present inventors, thevalue of Pi is influenced by the characteristics of the fluidized bedand by the structure of a fluidizing gas inlet means (14) or a reactiongas supplying means (15 r) or a particle discharging means (16) or a gasdischarging means (17), but its positional deviation according topressure measurement point is not greater than 1 bar. Accordingly, thepressure difference between the pressure (Po) at the outer zone (5) andthe pressure (Pi) at the inner zone (4) needs to be maintained within 1bar, i.e., the condition of 0 bar≦|Po−Pi|≦1 bar needs to be satisfied,following the steps of: measuring and/or controlling the pressure at theinner zone (4) directly or indirectly with the inner pressurecontrolling means; measuring and/or controlling the pressure at theouter zone (5) directly or indirectly with the outer pressurecontrolling means; and controlling the pressure difference between theouter zone (5) and the inner zone (4) by a pressure-differencecontrolling means.

As a preferred embodiment of the present invention, the outer pressurecontrolling means for measuring and/or controlling the pressure at theouter zone (5) directly or indirectly needs to be installed at anappropriate position selected so that it is spatially connected with theouter zone (5). The position where the outer pressure controlling meansmay be connected or installed includes, for example, at the outer zoneconnection means (28, 28 a, 28 b) or the inert gas connection means (26a, 26 b), which are installed at the reactor shell (1) spatially exposedto the outer zone (5) directly or indirectly. Since the outer zone (5)needs to be maintained under an inert gas atmosphere, the inert gasinlet (26 a) for supplying the inert gas (12) to the outer zone (5) andthe inert gas outlet (26 b) for discharging the inert gas (12) from theouter zone (5) can be utilized as the inert gas connection means (26 a,26 b) or the outer zone connection means (28, 28 a, 28 b). The inert gasinlet (26 a) and the inert gas outlet (26 b) may be installedindependent of the connection means (26, 28) or may be coupled with asingle connection means in the form of a double pipe. Accordingly, it isalso possible to install the outer pressure controlling means formeasuring and/or controlling the pressure at the outer zone (5) directlyor indirectly, so that it is spatially connected to the outer zone (5)through the inert gas connection means (26 a, 26 b) or the outer zoneconnection means (28, 28 a, 28 b) comprising the inert gas inlet (26 a)or the inert gas outlet (26 b).

Preferably, the difference of the pressure (P_(o)) at the outer zone (5)and the pressure (P_(i)) at the inner zone (4), i.e., the pressuredifference between both sides of the reactor tube (2), |P_(o)−P_(i)|, ismaintained satisfying the condition of 0 bar≦|Po−Pi|≦1 bar forcontinuous operation of the fluidized bed reactor even under a highreaction pressure. During each silicon deposition cycle by the presentinvention which comprises (i) the silicon particle preparation step;(ii) the silicon particle partial discharging step; (iii) the silicondeposit removal step; and (iv) the silicon particle replenishing step,the pressure at the inner zone (4) may vary in the range of from 1 to 20bar. But, as long as the pressure difference between both sides of thereactor tube (2) is maintained less than 1 bar, mechanical problemimposed on the reactor tube (2) caused by the silicon deposit (D) can bereduced significantly. If the pressure difference between both sides ofthe reactor tube (2) is maintained less than 1 bar, the silicondeposition reaction (Rd) and/or the etching reaction (R_(e)) can becarried out under a high reaction pressure. Consequently, theproductivity of the fluidized bed reactor can be maximized throughrepeated silicon deposition cycles and the physical stability of thereactor tube (2) can be improved throughout the cycles because thephysical load against the reactor tube (2) caused by the silicon deposit(D) accumulated during the silicon particle preparation step can bereduced.

The inner pressure controlling means and/or the outer pressurecontrolling means are equipped at the fluidized bed reactor for thisreason. Preferably, the |P_(o)−P_(i)| value needs to be maintained assmall as possible, considering that the P_(i) value may differ accordingto the steps constituting each silicon deposition cycle and depending onthe height of the inner zone (4).

INDUSTRIAL APPLICABILITY

As apparent from the foregoing description, the method for preparationof polycrystalline silicon using a fluidized bed reactor in accordancewith the present invention provides the following advantages.

1) Since the silicon deposit formed during the silicon deposition can beeasily removed from the inner wall of the reactor tube periodically,with little influence on the preparation of granular polycrystallinesilicon, especially without the need of disassembling the reactor, theproductivity of the fluidized bed reactor can be improved significantlywithout deteriorating the mechanical stability of the reactor.

2) The time required for the silicon deposit removal step can besignificantly reduced compared with the time required for the siliconparticle preparation step and the manipulation of the reactor requiredfor repeating the silicon deposition cycles can be much simplified.

3) Since the present invention is applicable to any type of fluidizedbed reactor in which the bed of silicon particles is divided into thereaction zone and the heating zone with the height of the outlet of thereaction gas supplying means as reference height, it is widelyapplicable to preparation of granular polycrystalline silicon.

4) The present invention enables a large-scale production of granularpolycrystalline silicon using a fluidized bed reactor.

5) Since the pressure difference between inside and outside of thereactor tube can be maintained as small as possible, the mechanicalstability of the reactor tube can be maintained even at a high pressure,regardless of the accumulation of silicon deposit. Also, the damage ofthe reactor tube caused by the pressure difference between both sides ofthe reactor tube can be prevented fundamentally.

6) Because the inert gas needs not to be supplied to the outer zone ofthe reactor continuously in large quantity, the pressure differencebetween both sides of the reactor tube can be maintained within acertain range at a low cost.

7) The reaction temperature required for the preparation ofpolycrystalline silicon can be attained with the silicon particleheating means.

8) Minimizing impurity contamination during silicon particle preparationstep, the present invention enables high purity polycrystalline siliconto be manufactured economically with good productivity and energyefficiency.

Those skilled in the art will appreciate that the concepts and specificembodiments disclosed in the foregoing description may be readilyutilized as a basis for modifying or designing other embodiments forcarrying out the same purposes of the present invention. Those skilledin the art will also appreciate that such equivalent embodiments do notdepart from the spirit and scope of the present invention as set forthin the appended claims.

1. A method for preparation of polycrystalline silicon using a fluidizedbed reactor for preparation of granular polycrystalline silicon, inwhich a reaction gas outlet of a reaction gas supplying means, thatsupplies a silicon-containing reaction gas so that silicon depositionmay occur while the bed of silicon particles formed inside a reactortube remains fluidized, is located inside of the bed of siliconparticles and, with the outlet end as the reference height, the upperand lower spaces in the reactor tube are respectively defined as areaction zone provided for silicon deposition by the reaction gas and aheating zone provided for heating the silicon particles, and whichcomprises: (i) a silicon particle preparation step, wherein the reactiongas is supplied by the reaction gas supplying means so that silicondeposition occurs on the surface of the silicon particles in contactwith the reaction gas, while silicon deposit is accumulated on the innerwall of the reactor tube encompassing the reaction zone; (ii) a siliconparticle partial discharging step, wherein, without requiring the supplyof the reaction gas, a part of the silicon particles remaining insidethe reactor tube is discharged out of the fluidized bed reactor so thatthe height of the bed of the silicon particles does not exceed theheight of the outlet; and (iii) a silicon deposit removal step, whereinthe silicon deposit is removed by supplying an etching gas into thereaction zone, which reacts with the silicon deposit to form gaseoussilicon compounds.
 2. The method for preparation of polycrystallinesilicon using a fluidized bed reactor as set forth in claim 1, whichfurther comprises (iv) a silicon particle replenishing step, wherein,after removing the silicon deposit and terminating the supply of theetching gas, silicon particles are replenished into the reactor tube toform a bed of silicon particles in the reaction zone.
 3. The method forpreparation of polycrystalline silicon using a fluidized bed reactor asset forth in claim 1, wherein the cycle comprising the steps (i), (ii),(iii) and (iv) is repeated.
 4. The method for preparation ofpolycrystalline silicon using a fluidized bed reactor as set forth inclaim 1, wherein the fluidized bed reactor comprises a reactor shellwhich encompasses the reactor tube, and the inner space of the reactortube is defined as an inner zone where the bed of silicon particles ispresent and the heating zone and the reaction zone are included, whilethe space between the reactor tube and the reactor shell is defined asan outer zone where the bed of silicon particles is not present andsilicon deposition does not occur.
 5. The method for preparation ofpolycrystalline silicon using a fluidized bed reactor as set forth inclaim 1, wherein (i) the silicon particle preparation step comprises thesub-steps of: supplying a fluidizing gas to the bed of silicon particlesin the heating zone using a fluidizing gas supplying means so that thebed of silicon particles formed in the reaction zone becomes fluidized;heating the silicon particles with a heating means equipped at the innerzone and/or the outer zone of the reactor tube; discharging a part ofthe silicon particles prepared in the inner zone out of the fluidizedbed reactor using a particle discharging means; and discharging anoff-gas gas comprising the fluidizing gas, which passes through the bedof silicon particles, a non-reacted reaction gas and a byproduct gas outof the fluidized bed reactor using a gas discharging means.
 6. Themethod for preparation of polycrystalline silicon using a fluidized bedreactor as set forth in claim 4, wherein an inert gas comprising atleast one selected from nitrogen, argon and helium is supplied to theouter zone in order to maintain the outer zone under an inert gasatmosphere.
 7. The method for preparation of polycrystalline siliconusing a fluidized bed reactor as set forth in claim 4, wherein thedifference of the pressure at the outer zone (Po) and the pressure atthe inner zone (Pi) is maintained satisfying the condition of 0bar≦|Po−Pi|≦1 bar.
 8. The method for preparation of polycrystallinesilicon using a fluidized bed reactor as set forth in claim 1, whereinthe etching gas comprises at least one chlorine-containing substanceselected from silicon tetrachloride (SiCl₄), hydrogen chloride (HCl) andchlorine (Cl2).
 9. The method for preparation of polycrystalline siliconusing a fluidized bed reactor as set forth in claim 8, wherein theetching gas further comprises at least one substance selected fromhydrogen, nitrogen, argon and helium.
 10. The method for preparation ofpolycrystalline silicon using a fluidized bed reactor as set forth inclaim 1, wherein, in (i) the silicon particle preparation step and/or(iii) the silicon deposit removal step, the absolute pressure at thereaction zone is maintained at in the range of 1-20 bar.
 11. The methodfor preparation of polycrystalline silicon using a fluidized bed reactoras set forth in claim 1, wherein (iii) the silicon deposit removal stepcomprises the sub-step of removing the silicon deposit formed at thereaction gas outlet of the reaction gas supplying means using theetching gas.
 12. The method for preparation of polycrystalline siliconusing a fluidized bed reactor as set forth in claim 1, wherein (iii) thesilicon deposit removal step is carried out by supplying the etching gasusing the reaction gas supplying means and/or an etching gas supplyingmeans the outlet of which is exposed to the reaction zone.
 13. Themethod for preparation of polycrystalline silicon using a fluidized bedreactor as set forth in claim 12, wherein, in (iii) the silicon depositremoval step, a fluidizing gas is supplied to the bed of siliconparticles remained in the heating zone using a fluidizing gas supplyingmeans so that the bed of the silicon particles is maintained as a fixedbed in which the particles become immobile or as a fluidized bed inwhich a part of the particles remains fluidized.
 14. The method forpreparation of polycrystalline silicon using a fluidized bed reactor asset forth in claim 5, wherein the fluidizing gas comprises at least onesubstance selected from hydrogen, nitrogen, argon, helium, silicontetrachloride, trichlorosilane, dichlorosilane and hydrogen chloride.15. The method for preparation of polycrystalline silicon using afluidized bed reactor as set forth in claim 5, wherein a fixed bed ofpacking materials that are not fluidized by the fluidizing gas is formedin addition to the bed of silicon particles at the lower space of theheating zone.
 16. The method for preparation of polycrystalline siliconusing a fluidized bed reactor as set forth in claim 12 wherein, in (iii)the silicon deposit removal step, an etching-step off-gas including thefluidizing gas being passed through the bed of silicon particles, anon-reacted etching gas and/or an etching reaction product gas isdischarged out of the fluidized bed reactor using a gas dischargingmeans.
 17. The method for preparation of polycrystalline silicon using afluidized bed reactor as set forth in claim 1 wherein the reaction gascomprises at least one silicon-containing substance selected frommonosilane (SiH₄), dichlorosilane (SiH₂Cl₂), trichlorosilane (SiHCl₃)and silicon tetrachloride (SiCl₄).
 18. The method for preparation ofpolycrystalline silicon using a fluidized bed reactor as set forth inclaim 1, wherein, in (iii) the silicon deposit removal step, thetemperature of a part of the silicon deposit is maintained within therange of 500-1,250° C.
 19. The method for preparation of polycrystallinesilicon using a fluidized bed reactor as set forth in claim 1, wherein,in (iii) the silicon deposit removal step, the silicon deposit is heatedby a heating means equipped at the inner zone of the reactor tube and/orat the outer zone.